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Micro and Nanofabrication
Lithographic Polymers and Processes
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Front-end processes for Micro and Nanodevices
Thin films by chemical vapor deposition (CVD)
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Copyright © 2006-2010
Home
About IMEL
Organisation
Location
Contact
Research
Micro and Nanofabrication
i. Lithographic Polymers and Processes
ii. Plasma Processing and Simulation for
Micro and Nano Patterning
iii. Front-end processes for Micro and
Nanodevices
iv. Thin films by chemical vapor deposition
(CVD)
Nanostructures and Nanoelectronic Devices
i. Nanostructures for nanoelectronics and
photonics
ii. Materials and devices for memory
applications
iii. Molecular materials as components of
electronic devices
Sensors and MEMs
i. Porous silicon technology and
applications
ii. Mechanical and chemical sensors
iii. Energy Harvesting Materials and
Devices
iv. Bio-microsystems
v. Thin films devices for large area
electronics
vi. Circuits and devices for optoelectronic
interconnections
R&D Projects
EU Projects
National Projects
Publications
Journal Papers
Conference Papers
Annual Reports
Patents
PhD & Master Theses
People
Researchers
Facilities & Services
Minasys - Center of Excellence
Nanotechnology and MEMS laboratory
Lab 1
Lab 2
Lab 3
Lab 4
Software
Education
PhD
Master Courses
Training
How to apply
News & Events
Research highlights
Awards & Distinctions
Events
Conferences & Workshops
Lectures
Schools & Seminars
Past Events
Job opening
